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HomeMIT 6.774 Physics of Microfabrication: Front End Processing, Fall 20044. Wafer Cleaning and Gettering (cont.)

MIT 6.774 Physics of Microfabrication: Front End Processing, Fall 2004

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Previous: 3. Crystal Growth, Wafer Fabrication, and Basic Properties of Si Wafers (cont.)Next: 5. Wafer Cleaning and Gettering - Contamination Measurement Techniques

4. Wafer Cleaning and Gettering (cont.)

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5. Wafer Cleaning and Gettering - Contamination Measurement Techniques

4. Wafer Cleaning and Gettering (cont.). Duration: 1:11:30.