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HomeMIT 6.774 Physics of Microfabrication: Front End Processing, Fall 20043. Crystal Growth, Wafer Fabrication, and Basic Properties of Si Wafers (cont.)
3. Crystal Growth, Wafer Fabrication, and Basic Properties of Si Wafers (cont.)
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4. Wafer Cleaning and Gettering (cont.)
* NOTE: Lectures 1 and 2 are not available. *